焦斌斌

中国科学院微电子研究所

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  • 焦斌斌
  • 研究员
  • 北京市朝阳区北土城西路3号

简 历:教育背景1999~2003:西安交通大学 电子科学与技术系,获学士学位2003~2008:中国科学院微电子研究所,获工学博士学位 社会任职: 研究方向:微机电系统、晶圆级封装、多传感器融合。 承担科研项目情况:

① 863计划04子课题负责人:具有环境控制功能的典型微纳传感器多参数批量测试设备研发与应用(2013AA041109),2013.01~2015.12;

② 863计划02子课题负责人:微纳系统三维异质集成化技术(2015AA042602),2015.03~2018.03;

③ 自然科学基金委重大仪器专项子课题负责人:复杂场景下多模态生物特征图像获取设备(61427811),2015.03~2018.12。

④ 中国科学院仪器设备功能开发项目负责人:基于短波红外显微镜系统的扩散键合微缺陷检测功能开发,2016.10~2018.09

代表论著:

① Yanmei Kong, Binbin Jiao*, Lemin Zhang, Shichang Yun, Dapeng Chen, DESIGN AND FABRICATION OF WAFER-LEVEL PACKAGED MEMS PIRANI GAUGE WITH SORROUNDED HEAT SINKS,Transducers2017,Taiwan,Accepted

② Lemin Zhang, Binbin Jiao*, Will Ku, Li-Tien Tseng, et al,An electrical test method for quality detecting of wafer level eutectic bonding,[J] J Micromech Microeng, 27(2016)1: 015028-1~8 (SCI)

③ Lemin Zhang, Binbin Jiao*, Shichang Yun, Yanmei Kong,Chih-Wei Ku, Dapeng Chen. A CMOS Compatible MEMS Pirani Vacuum Gauge with Monocrystal Silicon Heaters and Heat Sinks[J]. Chinese Physics Letters, 34(2017)2: 025101-1~4.

④ Lemin Zhang, Binbin Jiao*, Shichang Yun, Yanmei Kong, Dapeng Chen. Investigation and Optimization of Pirani Vacuum Gauges With Monocrystal Silicon Heaters and Heat Sinks[J]. Journal of Microelectromechanical Systems,26(2017)3:601~608.

⑤ Zhenyu Wang, Ning Zhang, Binbin Jiao*, Xinhai Yu, Investigation of thermal characteristics and two-phase flows of a star-shape thin heat pipe, [J]Applied Thermal Engineering, 103(2016):9-15.

⑥ Kong Yan-mei, Liu Rui-wen, Jiao Bin-bin*, Lu Di-ke, Zhu En-cheng, Fu Qiang-sheng ,Chen Da-peng, The thermal-mechanical performance of the uncooled infrared optical-readout bi-material FPA,[J] Microsyst Technol, 21(2015)7: 1495-1500.

⑦ Ruiwen Liu, Binbin Jiao*, Yanmei Kong, et al., Elimination of initial stress-induced curvature in a micromachined bi-material composite-layered cantilever, [J]J. Micromech. Microeng. 23 (2013) 09 5019-1~12.

⑧ Liu Ruiwen, Kong Yanmei, Jiao Binbin*, et al., A substrate-free optical readout focal plane array with heat sink structure, J. Semicond. 34(201)2:.024005-1~6.

专利申请:

① 焦斌斌,曾立天,一种用于检测共晶键合中合金化程度的结构,中国,授权号:ZL201410148635.6

② 焦斌斌,孔延梅,叶雨欣,刘瑞文,光学能量传输设备,中国,授权号:ZL201310680621.4.

③ 焦斌斌,孔延梅,程腾,高杰,“红外显微镜系统及其实现图像融合的方法”,中国, 授权号:ZL201210017015.x

④ 刘瑞文 焦斌斌 孔延梅 尚海平 李志刚 卢狄克 高超群 陈大鹏 光读出热-机械型红外探测器结构,中国,授权号:ZL201220003719.7;

⑤ 刘瑞文 焦斌斌 李志刚 孔延梅 卢狄克 陈大鹏 高响应率和灵敏度悬臂梁结构及其制作方法,2012.09,中国,授权号:ZL201220003583.X

⑥ 焦斌斌,孔延梅,叶雨欣,刘瑞文,魏显东,马贵兰,光学能量传输系统,中国,授权号:ZL201310680621.4

⑦ Binbin Jiao, Ruiwen Liu, Zhigang Li, Yanmei Kong, Dapeng Chen , Cantilever beam structure where stress is matched and method of manufacturing the same,美国,US9260297B2

⑧ Binbin Jiao, Dapeng Chen, Micrometer-scale grid structure based on single crystal silicon and method of manufacturing the same,美国,US862867B2

获奖及荣誉: